보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
PE CVD_#1 (SORONA) | 플라즈마 화학기상 증착기 Ⅰ / PEH-600 Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
PE CVD_#2 (SORONA) | 플라즈마 화학기상 증착기 Ⅱ / PEH-600 Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
PE CVD_#3 (TTL) | 플라즈마 화학기상 증착기 Ⅲ / FABStar+ Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Photolitho_MA6_#1 | 마스크 정렬노광기 / MA/BA6-8 Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Photolitho_MA6_#2 | 마스크 정렬노광기 / MA6 Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation
Photolitho_MDA400S | 미세패턴 정렬 노광기 / MDA-400S Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation
Plasma Treatment System | 폴리머 건식 식각기 / V15-G Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
RF Sputter | 고주파 스퍼터링 시스템 / SRN-120 Hyung-il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : 108동 B101호(Bldg, 108, Room B101)	Request of Analysis Reservation
RTP | Rapid Thermal Processing (급속 열처리 시스템) / AW610 Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108 building B101 (Nanofabrication center)	Request of Analysis Reservation
Schottky FE-SEM with e-beam attachment | 쇼트키 전계방출전자현미경과 부착형 이빔리소그래피 / SU5000/ELPHY Multibeam Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : Room B101, Building 108(UNFC)	Request of Analysis Reservation