보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
Dicing saw#2 | 기판절단장치 / NDS-1012 Hee-Song Hong 052-217-4194 armada@unist.ac.kr Equipment location : 자연과학관(108동) B101호	Request of Analysis Reservation
Dielectric ICP-RIE | 유도결합 플라즈마 산화막 건식 식각기 / FABstar Hee-Song Hong 052-217-4194 armada@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dielectric RIE | 건식 식각장치 / Labstar Hee-Song Hong 052-217-4194 armada@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
E-beam Evaporator(Temescal) | 전자빔 금속박막증착 장치 / FC-2000 Hyung-il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : 108동 B101호(Bldg, 108, Room B101)	Request of Analysis Reservation
E-beam Evaporator(Woosung) | 전자빔 금속박막증착 장치 / WC-4000 Hyung-il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation
E-beam lithography | 전자선 노광장치 시스템 / NB3 Luda Lee 052-217-4022 luda30159@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Ellipsometer | 박막 두께 측정기 / Elli-SE-UaM8 Bo-seong Kim 052-217-4191 mbosing@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Furnace_DRY | 열처리 확산로 / KHD-306 Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Furnace_WET | 열처리 확산로 / KHD-306 Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
HSC Sputter | 고단차피복 박막증착기 / SRN-130 Hyung Il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : NSB 108 Bldg. B101	Request of Analysis Reservation