Equipment

E-beam Evaporator(Temescal) | 전자빔 금속박막증착 장치

보유장비 관련 정보
Laboratory/Field
Model FC-2000
Maker Temescal
Technician Hyung-il Kim
Contact 052-217-4065 / hikim78@unist.ac.kr
Status for Reservation 가능
Reservation Unit 1hr Maximum Time (per day) 2hr
Open(~ago) 2주전 Cancel (~ago) 2hr
  • Description

    Electron beam source is shown by the power supply to the hot filament electron beam by the magnetic field induced by magnet.

  • Specifications

    • E-beam source assembly by Temescal in USA

    • 15 cc, 6 pocket (Au, Cr, Ni, Ti, Al, Pt, Pd)

    • Power supply : 6 kw (CV-6SLX)

    • Source control module (Temescal)

    • Substrate heat : 300 °C (4 kW)

    • Programmable sweep controller (Inficon)

    • Uniformity : less than ± 5 % within wafer

    less than ± 5 % wafer to wafer

  • Applications

    • Conventional materials coating

    • Lift off process

    • Metal electrode deposition on surfaces