보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
Inspection Microscope | 반도체 검사용 현미경 / DM 4000M Min-jae Kim 052-217-4064 mjkim@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Lapping | Lapping / LP70 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Laser lithography | 레이저 리소그래피 / Picomaster200 Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 나노소자공정실	Request of Analysis Reservation
LP CVD | 저압 화학기상 박막 증착기 / KVL-206 Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Measurement Microscope | 측정용 현미경 / Axio Scope A1 Min-jae Kim 052-217-4064 mjkim@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal ICP-RIE | 유도결합 플라즈마 금속 건식 식각기 / FABStar Min-jae Kim 052-217-4064 mjkim@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal ICP-RIE#2 | 유도결합플라즈마 금속 건식 식각기#2 / ICP380 Kang Oh Kim 052-217-4182 ko8809@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Optical Surface Profiler (비접촉식 표면 및 단차 측정기기) | Optical Surface Profiler (비접촉식 표면 및 단차 측정기기) / MicroXAM-800 Kang Oh Kim 052-217-4182 ko8809@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
PE CVD_#1 (SORONA) | 플라즈마 화학기상 증착기 Ⅰ / PEH-600 Bo-seong Kim 052-217-4191 mbosing@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
PE CVD_#2 (SORONA) | 플라즈마 화학기상 증착기 Ⅱ / PEH-600 Bo-seong Kim 052-217-4191 mbosing@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation