Optical Surface Profiler (비접촉식 표면 및 단차 측정기기) | Optical Surface Profiler (비접촉식 표면 및 단차 측정기기)
| Laboratory/Field | |||
|---|---|---|---|
| Model | MicroXAM-800 | ||
| Maker | KLA | ||
| Technician | Seon Jin Lee | ||
| Contact | 052-217-4193 / [email protected] | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 10분 | Maximum Time (per day) | 4Hour |
| Open(~ago) | 14Days | Cancel (~ago) | 2Hour |
| Equipment location | 108동 B101호 (Bldg. 108, Room B101) | ||
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Description
이 장비의 원리는 Interferometry이며, 반도체, MEMS 공정 후 미세패턴 및 구조물의 Critical Dimension, Height, Depth, Roughness, Defect 등을 정확하게 측정할 수 있으며, 특히 단시간에 측정하기 어려운 금속 패턴, 식각된 패턴을 비접촉, 비파괴로 빠른 측정이 가능함.
It can measure CD (Critical Dimension), Height, Depth, Roughness, Defect without non-contact method. Main Principle of this equipment is interferometry.
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Specifications
1. RMS Repeatability: 0.1nm
2. Vertical Rseolution: 0.2nm
3. VSI Scanning Speed: 1 ~ 29um/sec
4. X-Y motorized stage with encoders: 152 x 152 mm
5. 250 um Z-range piezo scan stage
6. Tilt Substrate Stage: ±6°, manual
7. Objectives: 10X, 20X, 50X
8. 3D Profiling program
9. VSI, PSI mode and stiching mode
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Applications
미세패턴, 표면조도, 결함 측정