보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
4point-probe | 표면 저항 측정기 / CMT2000N Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation
AFM | 원자힘 현미경 / Park NX20 Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : UNIST 108동 B101호	Request of Analysis Reservation
Atomic Layer Deposition | 원자층 증착 장비 / Lucida D100 Kim Boseong 052-217-4191 mbosing@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
CCP etcher | CCP etcher (용량성 결합 플라즈마 식각장치) / Telius Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 나노소자공정실	Request of Analysis Reservation
Cluster ALD | 원자층 증착 장비 / Atomic premium Hyung Il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
CMP | CMP (화학적표면 연마 시스템) / ORBIS Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호	Request of Analysis Reservation
Cryogenic Probe Station | 극저온탐침측정기 / CRX-4K Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B104호(Bldg.108, Room B104)	Request of Analysis Reservation
DC Sputter | 메탈 스퍼터링 시스템 / SRN-120 Hyung Il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : 108동 B101호(Bldg, 108, Room B101)	Request of Analysis Reservation
Deep Si Etcher | 깊은준위 건식식각 장치 / Tegal 200 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dicing Saw | 기판 절단장치 / AR06DM Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation