Equipment

Cryogenic Probe Station | 극저온탐침측정기

보유장비 관련 정보
Laboratory/Field
Model CRX-4K
Maker Lakeshore
Technician Hae-ra Kang
Contact 052-217-4167 / haera@unist.ac.kr
Status for Reservation 가능
Reservation Unit 0.5hr Maximum Time (per day) 2hr
Open(~ago) 5일전 Cancel (~ago) 2시간전
Equipment location 108동 B104호(Bldg.108, Room B104)
  • Description

    A probe station is used to physically acquire signals from the internal nodes of a semiconductor device. If the device is being electrically stimulated, the signal is acquired by the mechanical probe and is displayed on an oscilloscope. This is a ver satile micro-manipulated probe station used for non-destructive testing of devices on full and partial wafers up to 2" in diameter.

  • Specifications

    • Temperature : 6 K ~ 340 K

    • 4 micro-manipulated probe arms

    • 4" wafer probe capabilities

    • Cryogen-free CCR (closed cycle refrigerator)

    • High vacuum to 10-7 torr

    • Detector : KEITHLEY (4200-SCS)

  • Applications

    • Characterization of semiconductor device

    • Measurement of I-V curve in temperature variation (6 K ~ 370 K)

    • Measurement of 4 probe resistivity in temperature variation (6 K ~ 370 K)