Equipment

보유장비 리스트
이름 모델 장비이용의뢰서/예약하기

Advanced Plasma System | 플라즈마 시스템 / Model 960

Jeong-hwan Lim 052-217-4175 [email protected]
Equipment location : 102동 B106호 (Bldg.102, Room B106)

DC Sputter | 메탈 스퍼터링 시스템 / SRN-120

Hyung Il Kim 052-217-4065 [email protected]
Equipment location : 108동 B101호(Bldg, 108, Room B101)

Deep Si Etcher | 깊은준위 건식식각 장치 / Tegal 200

Kang O Kim 052-217-4182 [email protected]
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

Dielectric RIE | 건식 식각장치 / Labstar

Kang O Kim 052-217-4182 [email protected]
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

Electron-Beam PIKA Machine / PF32A

Jae-Hoon Cha 052-217-4069 [email protected]
Equipment location : 107동 105호 (Bldg. 107, Room 105)

FEI Sputter / EMITECH K575X

Gyeong Ae Lee 052-217-4163 [email protected]
Equipment location : 102동 B114호 (Bldg.102, Room B114)

Metal RIE | 메탈 건식 식각장치 / Labstar

Seon Jin Lee 052-217-4193 [email protected]
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

PE CVD_#1 (SORONA) | 플라즈마 화학기상 증착기 Ⅰ / PEH-600

Hyung Il Kim 052-217-4065 [email protected]
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

PE CVD_#3 (TTL) | 플라즈마 화학기상 증착기 Ⅲ / FABStar+

Kim Ka Hyeong 052-217-4190 [email protected]
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

RF Sputter | 고주파 스퍼터링 시스템 / SRN-120

Hyung-il Kim 052-217-4065 [email protected]
Equipment location : 108동 B101호(Bldg, 108, Room B101)