Equipment

FEI Sputter

보유장비 관련 정보
Laboratory/Field
Model EMITECH K575X
Maker Tescan
Technician Choi Innyeong
Contact 052-217-4058 / choiin@unist.ac.kr
Status for Reservation 가능
Reservation Unit Maximum Time (per day)
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  • Description

    Sputter system employs a magnetron target assembly, which enhances the efficiency of the process using low voltages and giving a fine-grain, cool sputtering.

  • Specifications

    • Deposition Current 0-150mA

  • Applications

    • Conductive materials coating