Advanced Plasma System | 플라즈마 시스템
|Contact||052-217-4175 / [email protected]|
|Status for Reservation||가능|
|Reservation Unit||0.5hr||Maximum Time (per day)||12hr|
|Equipment location||102동 B106호 (Bldg.102, Room B106)|
A totally NEW advanced plasma cleaning system for removal of hydrocarbon contamination on TEM and SEM samples. Solarus is a new generation plasma system engineered on new concepts and the latest technology resulting in better performance, simplified use and consistent cleaning results. SOLARUS offers the most effective cleaning system.
• The full-time turbo drag pumping system speeds up the entire cleaning cycle.
• Typical run rates are less than 2 minutes for two TEM samples in TEM holders, versus up to 20 minutes for other plasma cleaners in the market.
• Pump down - 50 seconds vs. 3 minutes
• Cleaning rates 30 sec - 120 sec vs. 2min - 10min
• Venting - 5 seconds vs. 6 minutes
• Enhanced imaging capability
• Improved accuracy when performing composition microanalysis
• Use of smaller probe size; a must for STEM and EELS analysis in a TEM/STEM