보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
Advanced Plasma System | 플라즈마 시스템 / Model 960 Jeong-hwan Lim 052-217-4175 jhwan0918@unist.ac.kr Equipment location : 102동 B106호 (Bldg.102, Room B106)	Request of Analysis Reservation
Cluster ALD | 원자층 증착 장비 / Atomic premium Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
DC Sputter | 메탈 스퍼터링 시스템 / SRN-120 Hyung Il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : 108동 B101호(Bldg, 108, Room B101)	Request of Analysis Reservation
Deep Si Etcher | 깊은준위 건식식각 장치 / Tegal 200 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dielectric RIE | 건식 식각장치 / Labstar Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Electron-Beam PIKA Machine / PF32A Jae-hoon Cha 052-217-4069 cjh614@unist.ac.kr Equipment location : 107동 105호 (Bldg. 107, Room 105)	Request of Analysis Reservation
FEI Sputter | FEI Sputter / K575X Gyeong Ae Lee 052-217-4163 kalee@unist.ac.kr Equipment location : 102동 B110호 (Bldg.102, Room B110)	Request of Analysis Reservation
Metal RIE | 메탈 건식 식각장치 / Labstar Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
PE CVD_#1 (SORONA) | 플라즈마 화학기상 증착기 Ⅰ / PEH-600 Bo-seong Kim 052-217-4191 mbosing@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
PE CVD_#3 (TTL) | 플라즈마 화학기상 증착기 Ⅲ / FABStar+ Hae-ra Kang 052-217-4167 haera@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation