Equipment

보유장비 리스트
이름 모델 장비이용의뢰서/예약하기

Advanced Plasma System | 플라즈마 시스템 / Model 960

Jeong-hwan Lim 052-217-4175 jhwan0918@unist.ac.kr
Equipment location : 102동 B106호 (Bldg.102, Room B106)

Cluster ALD | 원자층 증착 장비 / Atomic premium

Hyung Il Kim 052-217-4065 hikim78@unist.ac.kr
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

DC Sputter | 메탈 스퍼터링 시스템 / SRN-120

Hyung Il Kim 052-217-4065 hikim78@unist.ac.kr
Equipment location : 108동 B101호(Bldg, 108, Room B101)

Deep Si Etcher | 깊은준위 건식식각 장치 / Tegal 200

Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

Dielectric RIE | 건식 식각장치 / Labstar

Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

Electron-Beam PIKA Machine / PF32A

Jae-hoon Cha 052-217-4069 cjh614@unist.ac.kr
Equipment location : 107동 105호 (Bldg. 107, Room 105)

FEI Sputter | FEI Sputter / K575X

Gyeong Ae Lee 052-217-4163 kalee@unist.ac.kr
Equipment location : 102동 B110호 (Bldg.102, Room B110)

Metal RIE | 메탈 건식 식각장치 / Labstar

Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

PE CVD_#1 (SORONA) | 플라즈마 화학기상 증착기 Ⅰ / PEH-600

Hae-ra Kang 052-217-4167 haera@unist.ac.kr
Equipment location : 108동 B101호 (Bldg. 108, Room B101)

PE CVD_#3 (TTL) | 플라즈마 화학기상 증착기 Ⅲ / FABStar+

Hae-ra Kang 052-217-4167 haera@unist.ac.kr
Equipment location : 108동 B101호 (Bldg. 108, Room B101)