보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
CCP etcher | CCP etcher (용량성 결합 플라즈마 식각장치) / Telius Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 나노소자공정실	Request of Analysis Reservation
Deep Si Etcher | 깊은준위 건식식각 장치 / Tegal 200 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dielectric ICP-RIE | 유도결합 플라즈마 산화막 건식 식각기 / FABstar Hee-Song Hong 052-217-4194 armada@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dielectric RIE | 건식 식각장치 / Labstar Hee-Song Hong 052-217-4194 armada@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal ICP-RIE | 유도결합 플라즈마 금속 건식 식각기 / FABStar Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal ICP-RIE#2 | 유도결합플라즈마 금속 건식 식각기#2 / ICP380 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal RIE | 메탈 건식 식각장치 / Labstar Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Plasma Treatment System | 폴리머 건식 식각기 / V15-G Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Wet station_Acid#1 | 습식세정장치_산#1 / Wet station Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Wet station_Acid#2 | 습식세정장치 산#2 / Wet station Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation