보유장비 리스트

성명	모델	장비이용의뢰서/예약하기
CCP etcher | CCP etcher (용량성 결합 플라즈마 식각장치) / Telius Kang Oh Kim 052-217-4182 ko8809@unist.ac.kr Equipment location : 108동 B101호 나노소자공정실	Request of Analysis Reservation
Deep Si Etcher | 깊은준위 건식식각 장치 / Tegal 200 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dielectric ICP-RIE | 유도결합 플라즈마 산화막 건식 식각기 / FABstar Min-jae Kim 052-217-4064 mjkim@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dielectric RIE | 건식 식각장치 / Labstar Kang Oh Kim 052-217-4182 ko8809@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal ICP-RIE | 유도결합 플라즈마 금속 건식 식각기 / FABStar Min-jae Kim 052-217-4064 mjkim@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal ICP-RIE#2 | 유도결합플라즈마 금속 건식 식각기#2 / ICP380 Kang Oh Kim 052-217-4182 ko8809@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
NLD Etcher | NLD Etcher(양자 광소자 식각장치) / NLD-570 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 양자나노팹	Request of Analysis Reservation
Plasma PR Stripper | Plasma PR Stripper (감광제 제거기) / PTP300 Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr Equipment location : 108동 B101호	Request of Analysis Reservation
Plasma Treatment System | 폴리머 건식 식각기 / V15-G Min-jae Kim 052-217-4064 mjkim@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Wet station_Acid#1 | 습식세정장치_산#1 / Wet station Kang Oh Kim 052-217-4182 ko8809@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation