보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
E-beam lithography | 전자선 노광장치 시스템 / NB3 Luda Lee 052-217-4022 luda30159@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Laser lithography | 레이저 리소그래피 / Picomaster200 Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 나노소자공정실	Request of Analysis Reservation
Photolitho_MA6_#1 | 마스크 정렬노광기 / MA/BA6-8 Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Photolitho_MA6_#2 | 마스크 정렬노광기 / MA6 Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation
Photolitho_MDA400S | 미세패턴 정렬 노광기 / MDA-400S Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation
Schottky FE-SEM with e-beam attachment | 쇼트키 전계방출전자현미경과 부착형 이빔리소그래피 / SU5000/ELPHY Multibeam Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : Room B101, Building 108(UNFC)	Request of Analysis Reservation
Spin Coater | 감광제 도포기 / JSPD Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Spin coater & Bake system | 감광액 도포 및 베이크 시스템 / SSP200 Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation