이름 | 모델 | 장비이용의뢰서/예약하기 |
---|---|---|
Atomic Layer Deposition | 원자층 증착 장비 / Lucida D100Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
Request of Analysis Reservation | |
Cluster ALD | 원자층 증착 장비 / Atomic premiumEquipment location : 108동 B101호 (Bldg. 108, Room B101) |
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Dielectric RIE | 건식 식각장치 / LabstarEquipment location : 108동 B101호 (Bldg. 108, Room B101) |
Request of Analysis Reservation | |
Furnace_WET | 열처리 확산로 / KHD-306Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
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PE CVD_#1 (SORONA) | 플라즈마 화학기상 증착기 Ⅰ / PEH-600Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
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RF Sputter | 고주파 스퍼터링 시스템 / SRN-120Equipment location : 108동 B101호(Bldg, 108, Room B101) |
Request of Analysis Reservation |