이름 | 모델 | 장비이용의뢰서/예약하기 |
---|---|---|
E-beam lithography | 전자선 노광장치 시스템 / NB3Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
Request of Analysis Reservation | |
Photolitho_MA6_#1 | 마스크 정렬노광기 / MA/BA6-8Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
Request of Analysis Reservation | |
Photolitho_MDA400S | 미세패턴 정렬 노광기 / MDA-400SEquipment location : 108동 B101호 (Bldg.108, Room B101) |
Request of Analysis Reservation | |
Spin Coater | 감광제 도포기 / JSPDEquipment location : 108동 B101호 (Bldg. 108, Room B101) |
Request of Analysis Reservation | |
Spin coater & Bake system | 감광액 도포 및 베이크 시스템 / SSP200Equipment location : 108동 B101호 (Bldg.108, Room B101) |
Request of Analysis Reservation |