보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
E-beam lithography | 전자선 노광장치 시스템 / NB3 Goh Myeong Bae 052-217-4189 bgm0421@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Nano Imprinter | 나노임프린트 묘화시스템 / ANT-6HR Min-jae Kim 052-217-4064 mjkim@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Photolitho_MA6_#1 | 마스크 정렬노광기 / MA/BA6-8 Goh Myeong Bae 052-217-4189 bgm0421@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Photolitho_MDA400S | 미세패턴 정렬 노광기 / MDA-400S Goh Myeong Bae 052-217-4189 bgm0421@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation
Spin Coater | 감광제 도포기 / JSPD Goh Myeong Bae 052-217-4189 bgm0421@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Spin coater & Bake system | 감광액 도포 및 베이크 시스템 / SSP200 Goh Myeong Bae 052-217-4189 bgm0421@unist.ac.kr Equipment location : 108동 B101호 (Bldg.108, Room B101)	Request of Analysis Reservation