이름 | 모델 | 장비이용의뢰서/예약하기 |
---|---|---|
Schottky FE-SEM with e-beam attachment | 쇼트키 전계방출전자현미경과 부착형 이빔리소그래피 / SU5000/ELPHY MultibeamEquipment location : Room B101, Building 108(UNFC) |
Request of Analysis Reservation | |
Spin Coater | 감광제 도포기 / JSPDEquipment location : 108동 B101호 (Bldg. 108, Room B101) |
Request of Analysis Reservation | |
Spin coater & Bake system | 감광액 도포 및 베이크 시스템 / SSP200Equipment location : 108동 B101호 (Bldg.108, Room B101) |
Request of Analysis Reservation | |
Surface profiler | 박막 단차 측정기 / P6Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
Request of Analysis Reservation |