Equipment

Surface profiler | 박막 단차 측정기

보유장비 관련 정보
Laboratory/Field
Model P6
Maker KLA Tencor
Technician Kang O Kim
Contact 052-217-4182 / ko8809@unist.ac.kr
Status for Reservation 가능
Reservation Unit 30min Maximum Time (per day) 1hr
Open(~ago) 2주전 Cancel (~ago) 2hr
Equipment location 108동 B101호 (Bldg. 108, Room B101)
  • Description

    The P-6 stylus profiler and surface analysis system offers a combination of advanced features for process development and manufacturing control of scientific research, and other industrial metrology applications

  • Specifications

    • Single 2D & 3D scanning profiler

    • 150 mm diameter vacuum & motorized sample stage or bigger

    • Manual or auto theta sample stage

    • Zoom optic : top view 185 ~ 750 or 115 ~ 465 x

    • Automatic step detection and multiple cursor positioning

    • Scan length : 150 mm

    • CCTV zoom : top view 185 ~ 750 or 115 ~ 465 x

    • Stylus force : adjustable between 1 ~ 15 mg

    • L-stylus : 2 um radius 60 degree

  • Applications

    • MEMS / NANO device

    • LEDs

    • Storage device

    • UV embossing / Nano imprint lithography