보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
CCP etcher | CCP etcher (용량성 결합 플라즈마 식각장치) / Telius Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 나노소자공정실	Request of Analysis Reservation
Cluster ALD | 원자층 증착 장비 / Atomic premium Hyung Il Kim 052-217-4065 hikim78@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
CMP | CMP (화학적표면 연마 시스템) / ORBIS Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호	Request of Analysis Reservation
Cryogenic Probe Station | 극저온탐침측정기 / CRX-4K Eun Jeong Hwang 052-217-4192 hej9204@unist.ac.kr Equipment location : 108동 B104호(Bldg.108, Room B104)	Request of Analysis Reservation