보유장비 리스트

이름	모델	장비이용의뢰서/예약하기
Deep Si Etcher | 깊은준위 건식식각 장치 / Tegal 200 Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Dielectric RIE | 건식 식각장치 / Labstar Song-Hee Lee 052-217-4190 lychle2@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation
Metal RIE | 메탈 건식 식각장치 / Labstar Seon Jin Lee 052-217-4193 sunee6210@unist.ac.kr Equipment location : 108동 B101호 (Bldg. 108, Room B101)	Request of Analysis Reservation