Equipment

Ultra-Precision Nano Machine | 초정밀 나노가공기

보유장비 관련 정보
Laboratory/Field
Model FANUC ROBONANO α - 0iB
Maker FANUC
Technician Kang-uk Kwon
Contact 052-217-4066 / kku1050@unist.ac.kr
Status for Reservation 가능
Reservation Unit 3시간 Maximum Time (per day) 8시간
Open(~ago) 1주일 Cancel (~ago) 1일
  • Description

    Ultra-precision nano machine is combining nano servo technology with the newest linear motor and on same machine built in motor and air bearing technology, measures the slope by using rotation axes, and controls 5-axes (3 of linear curve axes : X, Y, Z and 2 of rotation axes : B, C) simultaneously. It is convenient to install spindles or manufacture materials in all tables, as its tables of rotation axes B and C have the same structure and function.

  • Specifications

    • Stroke - axes (X-Z-Y) : 280 x 150 x 40 mm - axes (B-C) : 360 °

    • Command resolution - axes (X-Z-Y) : 1 nm - axes (B-C) : 0.000001 °

    • Bearing type : Hydrostatic air bearing

    • Milling spindle

    - diameter of shank : Φ6 mm

    - maximum rotation speed : 50,000 min-1

    - size/mass : Φ74 x 84 mm/1.5 Kg

    • Turning spindle

    - diameter of shaft table : Φ72 mm

    - maximum rotation speed : 7,000 min-1

    - size/mass : Φ184 x 77 mm/4.8 Kg

    • Nanochecker

    - maximum measuring angle 3-axes : ± 60 ° / 5-axes : ± 90 °

  • Applications

    • Diffraction grating

    • Prism groove

    • Lens array

    • Micro channel for Bio-chip

    • Free curved surface

    • Spherical process