Equipment

Three Dimemsional Measurement | 비접촉 3차원 측정기

보유장비 관련 정보
Laboratory/Field
Model NV-3000
Maker Nanosystem
Technician Kang-uk Kwon
Contact 052-217-4066 / kku1050@unist.ac.kr
Status for Reservation 가능
Reservation Unit 30분 Maximum Time (per day) 8시간
Open(~ago) 1주일 Cancel (~ago) 3시간
  • Description

    Probe system moves towards an optical axes at very small intervals of scores of nm. It inspects whether interference is generated from all pixels in image. height in an optional pixel point is set on a place where in terference signal is maximized, and by preforming this in pixel an entire image, this method produces three dimensional form.

  • Specifications

    • Interferometric objective : 5 lens available

    • Scan range : 0 ~ 180μm (option 270μm, 5 mm)

    • Vertical resolution : WSI < 0.5μm/PSI < 0.1μm

    • Lateral resolution : 0.2 ~ 4μm

    • Tip/tilt : ± 6 ° (probe tip/tilt)

    • Workpiece stage :

    - NV-P2020 / 200 x 200 mm (motorized)

    - NV-P4050 / 400 x 500 mm (motorized)

  • Applications

    • 3D analysis of surface

    • Semiconductor parts test

    • Roughness average measurement