Three Dimemsional Measurement | 비접촉 3차원 측정기
| Laboratory/Field | |||
|---|---|---|---|
| Model | NV-3000 | ||
| Maker | Nanosystem | ||
| Technician | Kang-uk Kwon | ||
| Contact | 052-217-4066 / kku1050@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 30분 | Maximum Time (per day) | 8시간 |
| Open(~ago) | 1주일 | Cancel (~ago) | 3시간 |
| Equipment location | 107동 110호 (Bldg.107, Room.110) | ||
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Description
Probe system moves towards an optical axes at very small intervals of scores of nm. It inspects whether interference is generated from all pixels in image. height in an optional pixel point is set on a place where in terference signal is maximized, and by preforming this in pixel an entire image, this method produces three dimensional form.
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Specifications
• Interferometric objective : 5 lens available
• Scan range : 0 ~ 180μm (option 270μm, 5 mm)
• Vertical resolution : WSI < 0.5μm/PSI < 0.1μm
• Lateral resolution : 0.2 ~ 4μm
• Tip/tilt : ± 6 ° (probe tip/tilt)
• Workpiece stage :
- NV-P2020 / 200 x 200 mm (motorized)
- NV-P4050 / 400 x 500 mm (motorized)
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Applications
• 3D analysis of surface
• Semiconductor parts test
• Roughness average measurement