Surface profiler | 박막 단차 측정기
| Laboratory/Field | |||
|---|---|---|---|
| Model | P6 | ||
| Maker | KLA Tencor | ||
| Technician | Seonjin Lee | ||
| Contact | 052-217-4193 / sunee6210@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 30min | Maximum Time (per day) | 1hr |
| Open(~ago) | 2주전 | Cancel (~ago) | 2hr |
| Equipment location | 108동 B101호 (Bldg. 108, Room B101) | ||
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Description
The P-6 stylus profiler and surface analysis system offers a combination of advanced features for process development and manufacturing control of scientific research, and other industrial metrology applications
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Specifications
• Single 2D & 3D scanning profiler
• 150 mm diameter vacuum & motorized sample stage or bigger
• Manual or auto theta sample stage
• Zoom optic : top view 185 ~ 750 or 115 ~ 465 x
• Automatic step detection and multiple cursor positioning
• Scan length : 150 mm
• CCTV zoom : top view 185 ~ 750 or 115 ~ 465 x
• Stylus force : adjustable between 1 ~ 15 mg
• L-stylus : 2 um radius 60 degree
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Applications
• MEMS / NANO device
• LEDs
• Storage device
• UV embossing / Nano imprint lithography