Equipment

SU8220 Cold FE-SEM | 저온전계방출형주사전자현미경

보유장비 관련 정보
Laboratory/Field
Model SU-8220
Maker Hitach High-Technologies
Technician Choi Innyeong
Contact 052-217-4058 / choiin@unist.ac.kr
Status for Reservation 가능
Reservation Unit 0.5hr Maximum Time (per day) 2hr
Open(~ago) 5일전 Cancel (~ago) 2시간전
  • Description

    SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.

  • Specifications

    • Resolution : 0.8nm at 15kV, 1.1nm at 1kV (Deaceleration mode)

    • Magnification : LM 20 ~ 2,000X, HM 100 ~ 800,000X

    • Accelerate Voltage : 0.1 ~ 30kV(0.1kV/step)

    • Detector : SE, HA-BSE, LA-BSE, EDS

    • Electrical image shift : ±12㎛(WD=8mm)

    • Electron gun : cold cathode field emission electron source

    • Contamination Prevention : Anti-contamination trap

    • Traverse : XY axis 50mm X 50mm

  • Applications

    • Secondary electron image

    • Energy dispersive spectroscopy (EDS)