SU8220 Cold FE-SEM | 저온전계방출형주사전자현미경
| Laboratory/Field | |||
|---|---|---|---|
| Model | SU8220 | ||
| Maker | Hitachi High-Technologies | ||
| Technician | Gyeong Ae Lee | ||
| Contact | 052-217-4163 / kalee@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 0.5hr | Maximum Time (per day) | 2hr |
| Open(~ago) | 5일전 | Cancel (~ago) | 2시간전 |
| Equipment location | 102동 B115호 (Bldg.102, Room B115) | ||
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Description
SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.
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Specifications
• Resolution : 0.8nm at 15kV, 1.1nm at 1kV (Deaceleration mode)
• Magnification : LM 20 ~ 2,000X, HM 100 ~ 800,000X
• Accelerate Voltage : 0.1 ~ 30kV(0.1kV/step)
• Detector : SE, HA-BSE, LA-BSE, EDS
• Electrical image shift : ±12㎛(WD=8mm)
• Electron gun : cold cathode field emission electron source
• Contamination Prevention : Anti-contamination trap
• Traverse : XY axis 50mm X 50mm
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Applications
• Secondary electron image
• Energy dispersive spectroscopy (EDS)