Equipment

Quanta200 FE-SEM | 전계방출형주사전자현미경

보유장비 관련 정보
Laboratory/Field
Model Quanta 200FEG
Maker FEI
Technician Choi Innyeong
Contact 052-217-4058 / choiin@unist.ac.kr
Status for Reservation 가능
Reservation Unit 0.5hr Maximum Time (per day) 2hr
Open(~ago) 5일전 Cancel (~ago) 2시간전
  • Description

    SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.

  • Specifications

    • Electron gun

    : Schottky type thermal FE gun

    • Resolution

    - < 1.2 nm @30 kV high vacuum mode

    - < 1.5 nm @30 kV low vacuum mode

    - < 1.5 nm @30 kV ESEM mode

    • Beam current : > 100 nA

    • Heating stage (1,500 ˚C)

    • Cooling stage (-20 ˚C)

  • Applications

    • High vacuum mode

    • Low vacuum mode (10 to 130 Pa)

    • ESEM mode (10 to 4,000 Pa)