PECS | 고해상도코팅기
| Laboratory/Field | |||
|---|---|---|---|
| Model | Gatan model 682 | ||
| Maker | Gatan | ||
| Technician | Sun-yi Lee | ||
| Contact | 052-217-4023 / ssun295@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | Maximum Time (per day) | ||
| Open(~ago) | Cancel (~ago) | ||
| Equipment location | 102동 B122호 | ||
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Description
PECS is the ideal instrument for application requiring sample cleaning or etching followed by high-resolution sputter coating.
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Specifications
• Ion guns : One penning ion guns
• Ion beam energy : 1.0 keV to 10.0keV
• Etched area : About 7mm - 10mm dependent on gun energy
• Sample rotation : Varible speed 10 -60 rpm
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Applications
• SEM sample coating and etching