Low Angle Ion Mill | 이온밀링기
| Laboratory/Field | |||
|---|---|---|---|
| Model | Model 1050 | ||
| Maker | E.A. Fischione Instruments, Inc. | ||
| Technician | Gyeong Ae Lee | ||
| Contact | 052-217-4163 / kalee@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 0.5hr | Maximum Time (per day) | 12hr |
| Open(~ago) | 5일전 | Cancel (~ago) | 2시간전 |
| Equipment location | 102동 B122호 (Bldg.102, Room B122) | ||
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Description
Low angle ion mill is a machine fabricating a semiconductor and inorganic materials in the diameter of the disk-shaped 3mmφ thickness 50 ~ 80㎛ and create a sample for TEM analysis to several tens of nanometers thin by making the disk medium.
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Specifications
• Ion sources
- Two TrueFocus ion sources
- Variable energy (100 eV to 6.0 KeV) operation, continuously adjustable
- Beam current up to 10 mA/cm²
- Choice of single or dual ion source operation
• Specimen stage
- Milling angle range of -10 ° to +10 °
- 360 ° specimen rotation with motion sequencing
- Specimen rocking
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Applications
• TEM sample preparation