E-beam Evaporator(Woosung) | 전자빔 금속박막증착 장치
| Laboratory/Field | |||
|---|---|---|---|
| Model | WC-4000 | ||
| Maker | WOOSUNG Hi-vac | ||
| Technician | Hyung-il Kim | ||
| Contact | 052-217-4065 / hikim78@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 3hr | Maximum Time (per day) | 3hr |
| Open(~ago) | 2주전 | Cancel (~ago) | 2hr |
| Equipment location | 108동 B101호 (Bldg.108, Room B101) | ||
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Description
Electron beam source is shown by the power supply to the hot filament electron beam by the magnetic field induced by magnet.
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Specifications
• E-beam source assembly by TELEMARK in USA
• 7 cc, 6 pocket (Au, Cr, Cu, Ni, Ti, Al, Pt, Pd)
• Power supply : 6 kW (SJ Power)
• Substrate Rotation Speed: 0 ~ 80 rpm
• Programmable sweep controller (Sycon)
• Uniformity : less than ± 5 % within wafer
less than ± 5 % wafer to wafer
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Applications
• Conventional materials coating
• Lift off process
• Metal electrode deposition on surfaces