Cold FE-SEM | 저온주사전자현미경
| Laboratory/Field | |||
|---|---|---|---|
| Model | S-4800 | ||
| Maker | Hitach High-Technologies | ||
| Technician | Eun Jin Jeong | ||
| Contact | 052-217-4177 / ejjeong@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 0.5hr | Maximum Time (per day) | 2hr |
| Open(~ago) | 5일전 | Cancel (~ago) | 2시간전 |
| Equipment location | 102동 B110호(Bldg.102, Room B110) | ||
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Description
SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.
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Specifications
• Electron gun
: cold cathode field emission electron source
• Resolution
- < 1.0 nm @15 kV
• Magnification
- LM 20 ~ 2,000 x, HM 100 ~ 800,000 x
• Accelerate voltage : 0.1 ~ 30 kV (0.1 kV/step)
• Electrical image shift : ± 12μm (WD = 8 mm)
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Applications
• Secondary electron image
• Energy dispersive spectroscopy (EDS)