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보유장비 관련 정보
Laboratory/Field
  • Nano Fabrication Center
  • Measurement
Model CMT2000N
Maker AIT
Technician Song-Hee Lee
Contact 052-217-4190 / lychle2@unist.ac.kr
Status for Reservation 가능
Reservation Unit 30min Maximum Time (per day) 1hr
Open(~ago) 2주전 Cancel (~ago) 2hr
Equipment location 108동 B101호 (Bldg.108, Room B101)

  • Description

    Full automatic system measures sheet resistance and resistivity silicon wafer, metal, and solar cell, etc. This system can be operated by itself. Furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analysis.

  • Specifications

    • Measurement range : 1 mΩ/sq ~ 2 mΩ/sq

    • Measurement accuracy : ± 0.5 % (standard resistor)

    • Measurement pattern : ASTM, SEMI, customer design

    • Data analysis : data map, contour & 3D mapping

    • Measurement range : Ω, Ω/sq, Ω/cm

    • Current source : 10 nA ~ 100 mA

    • Voltage : 0 ~ 2,000 mV

    • Substrate size : 200 mm (wafer) / 140 × 140 mm (square)

  • Applications

    • Sheet resistance measurement of thin film

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