Cryogenic Probe Station | 극저온탐침측정기
| Laboratory/Field | |||
|---|---|---|---|
| Model | CRX-4K | ||
| Maker | Lakeshore | ||
| Technician | Eun Jeong Hwang | ||
| Contact | 052-217-4192 / hej9204@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 1hr | Maximum Time (per day) | 24hr |
| Open(~ago) | 5일전 | Cancel (~ago) | 2시간전 |
| Equipment location | 108동 B104호(Bldg.108, Room B104) | ||
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Description
A probe station is used to physically acquire signals from the internal nodes of a semiconductor device. If the device is being electrically stimulated, the signal is acquired by the mechanical probe and is displayed on an oscilloscope. This is a ver satile micro-manipulated probe station used for non-destructive testing of devices on full and partial wafers up to 2" in diameter.
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Specifications
• Temperature : 6 K ~ 340 K
• 4 micro-manipulated probe arms
• 4" wafer probe capabilities
• Cryogen-free CCR (closed cycle refrigerator)
• High vacuum to 10-7 torr
• Detector : KEITHLEY (4200-SCS)
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Applications
• Characterization of semiconductor device
• Measurement of I-V curve in temperature variation (6 K ~ 370 K)
• Measurement of 4 probe resistivity in temperature variation (6 K ~ 370 K)