Equipment

High Resolution X-ray Diffractometer(HRXRD 2) | 고분해능 X-선 회절분석기

보유장비 관련 정보
Laboratory/Field
Model SmartLab
Maker RIGAKU
Technician Gyeong Ae Lee
Contact 052-217-4163 / kalee@unist.ac.kr
Status for Reservation 가능
Reservation Unit 30분 Maximum Time (per day)
Open(~ago) Cancel (~ago)
Equipment location 울산광역시 울주군 언양읍 유니스트길 50 102동 B101-2호
  • Description

    ○ 응용: 박막 결정구조 분석

    ○ 측정범위: 5~110 도

    ○ 샘플량: 박막 및 호일 1um 이하
    ○ 샘플준비
    - 가로세로 1cm ~ 2cm 크기로 준비(윗면과 바닥 모두 이물질 없는 깨끗한 상태로 준비​)

    ○ For self-use only -> Please request XRD analysis using HRPXRD

    ○ Application: Crystal structure analysis of thin film

    ○ Measurement range: 5~110 degrees

    ○ Sample amount: Thin film and foil 1um or less
    ○ Sample preparation
    - Prepare in a size of 1cm to 2cm in width and length(Dust free)

  • Specifications

    ○ X-ray generator

    - Max. output : 9kW or more

    - Max. voltage : 45kV or more

    - Max. current : 200mA or more

    - Source : Rotating anode Cu target

    ○ Goniometer

    - Type : Theta-Theta vertical type

    - Radius : 300mm or more

    ○ Multi-axes large cradle stage

    - Theta/2theta : -3 to 162 deg or more

    - 2theta/chi-axis(In-Plane) : 3 to 120 deg or more

    - Chi-axis : -5 to +95 deg or more

    - Phi-axis : -360 to +360 deg (unlimited) or more

    - Z-axis : 2mm or more

    - Max. sample size : 8 inch or more

    ○ Slit & Optics

    - Incident & Receiving slit : Automatic variable slit

    - Parabolic mirror optic : Parallel beam

    ○ Detector

    - Type : Hybrid multi-channel semi-conductive detector

    - Active area : 380mm²or more

    - Strip size : 75μm or less

    - Scan mode : 1D & 0D or more

    ○ Software & Utilities

    - Standard functions

    - Application functions

    - Chiller & AVR, PC

  • Applications