Wet station_Solvent#2 | 습식세정장치 유기#2
| Laboratory/Field | |||
|---|---|---|---|
| Model | Wet station | ||
| Maker | Changshintech | ||
| Technician | Song-Hee Lee | ||
| Contact | 052-217-4190 / lychle2@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 30min | Maximum Time (per day) | 3hr |
| Open(~ago) | 2week | Cancel (~ago) | 2Hr |
| Equipment location | 108동 B101호 (Bldg. 108, Room B101) | ||
-
Description
포토레지스트, 시료 표면 습식 세정공정 (유기용제)
최대 8인치 공정 가능 (물중탕 가열 가능)
아세톤, 이소프로판올 등의 유기용제 사용 가능PR, Surface wet cleaning (Solvent chemical)
Max. 8inch process (double bath heating)
Acetone, 2-propanol etc. -
Specifications
• Chemical supply : Manual
• Chemical temp. : ~40
• Solvent bath : 1set, heater (~40℃)
• 1 QDR bath, 1 Rinse bath, 1 Drain Cup
• Touch pad control
-
Applications
• PR cleaning
• Organic particle cleaning
• Lift off process