Low angle ion mill
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Description
Low angle ion mill is a machine fabricating a semiconductor and inorganic materials in the diameter of the disk-shaped 3mmφ thickness 50 ~ 80㎛ and create a sample for TEM analysis to several tens of nanometers thin by making the disk medium.
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Specifications
• Ion sources
- Two TrueFocus ion sources
- Variable energy (100eV to 6.0KeV) operation, continuously adjustable
- Beam current up to 10mA/cm²
- Choice of single or dual ion source operation
• Specimen stage;
- Milling angle range of -10° to +10°
- 360° specimen rotation with motion sequencing
- Specimen rocking
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Applications
• TEM sample prep