High Resolution XRD
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Description
X-ray diffraction is a non-destructive analytical technique which reveals information about the crystallographic structure, chemical composition, and physical properties of powder and thin films.
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Specifications
• X-ray source : Cu-closed x-ray tube
• Focus : line focus
• X-ray generator : single, 220 V, 3 kW
• θ-2θ based goniometer
• Angular range
- θ : 0 ~ 360 °
- 2θ : - 110 ° ~ 168 °more
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Applications
• Determination of lattice mismatch between film & substrate
• Assumption of stress and strain
• Determination of dislocation density and characterization of the film
• Measurement of super-lattices in multilayered epitaxial structures
• Determination of the thickness, roughness, and density of the film (XRR)