보유장비

Parylene Coater | 페럴린 증착장치

Parylene Coater
보유장비 관련 정보
연구실/분야
모델명 -
제조사 Alpha plus
담당자 김형일
연락처 052-217-4065 / hikim78@unist.ac.kr
예약 가능여부 가능
예약단위 4hr 1일최대예약시간 4hr
예약Open(~일 전) 2주전 예약취소불가(~일 전) 2hr
장비위치 108동 B101호(Bldg, 108, Room B101)
  • Description

    The Dimer is inserted into the vaporizer in the powder form and evaporated between 120 - 175 °C Furnace chamber heated to approximately 650 - 690 degrees through the monomer which is converted to the substrate. After the process, the temperature is recovered to room temperature, creating a Poly-para-Xylylene film coating.

  • Specifications

    • Dimer type : c

    • Deposition rate : over 1-2 um/hr

    • Substrate size : max. dia. 200 mm

    • Process temperature - furnace (R/T to 1000 °C ± °C)

    - /Vaporizer (R/T to 300 °C ± 3 °C)

    • Thickness variation : less than ± 10 % within wafer

  • Applications

    • MEMS / NANO Device

    • SAW filters

    • UV embossing / Nano imprint lithography

    • Telecommunication devices