보유장비

Ultra-Precision Nano Machine | 초정밀 나노가공기

Ultra-Precision Nano Machine
보유장비 관련 정보
연구실/분야
모델명 FANUC ROBONANO α - 0iB
제조사 FANUC
담당자 권강욱
연락처 052-217-4066 / kku1050@unist.ac.kr
예약 가능여부 가능
예약단위 3시간 1일최대예약시간 8시간
예약Open(~일 전) 1주일 예약취소불가(~일 전) 1일
장비위치 107동 106호 (Bldg.107,Room 106)
  • Description

    Ultra-precision nano machine is combining nano servo technology with the newest linear motor and on same machine built in motor and air bearing technology, measures the slope by using rotation axes, and controls 5-axes (3 of linear curve axes : X, Y, Z and 2 of rotation axes : B, C) simultaneously. It is convenient to install spindles or manufacture materials in all tables, as its tables of rotation axes B and C have the same structure and function.

  • Specifications

    • Stroke - axes (X-Z-Y) : 280 x 150 x 40 mm - axes (B-C) : 360 °

    • Command resolution - axes (X-Z-Y) : 1 nm - axes (B-C) : 0.000001 °

    • Bearing type : Hydrostatic air bearing

    • Milling spindle

    - diameter of shank : Φ6 mm

    - maximum rotation speed : 50,000 min-1

    - size/mass : Φ74 x 84 mm/1.5 Kg

    • Turning spindle

    - diameter of shaft table : Φ72 mm

    - maximum rotation speed : 7,000 min-1

    - size/mass : Φ184 x 77 mm/4.8 Kg

    • Nanochecker

    - maximum measuring angle 3-axes : ± 60 ° / 5-axes : ± 90 °

  • Applications

    • Diffraction grating

    • Prism groove

    • Lens array

    • Micro channel for Bio-chip

    • Free curved surface

    • Spherical process