E-beam Evaporator(Temescal) | 전자빔 금속박막증착 장치
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | FC-2000 | ||
| 제조사 | Temescal | ||
| 담당자 | 김보성 | ||
| 연락처 | 052-217-4191 / mbosing@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 1hr | 1일최대예약시간 | 2hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호(Bldg, 108, Room B101) | ||
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Description
Electron beam source is shown by the power supply to the hot filament electron beam by the magnetic field induced by magnet.
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Specifications
• E-beam source assembly by Temescal in USA
• 15 cc, 6 pocket (Au, Cr, Ni, Ti, Al, Pt, Pd)
• Power supply : 6 kw (CV-6SLX)
• Source control module (Temescal)
• Substrate heat : 300 °C (4 kW)
• Programmable sweep controller (Inficon)
• Uniformity : less than ± 5 % within wafer
less than ± 5 % wafer to wafer
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Applications
• Conventional materials coating
• Lift off process
• Metal electrode deposition on surfaces