보유장비

Three Dimemsional Measurement | 비접촉 3차원 측정기

Three Dimemsional Measurement
보유장비 관련 정보
연구실/분야
모델명 NV-3000
제조사 Nanosystem
담당자 권강욱
연락처 052-217-4066 / kku1050@unist.ac.kr
예약 가능여부 가능
예약단위 30분 1일최대예약시간 8시간
예약Open(~일 전) 1주일 예약취소불가(~일 전) 3시간
장비위치 107동 107호 (Bldg.107, Room.107)
  • Description

    Probe system moves towards an optical axes at very small intervals of scores of nm. It inspects whether interference is generated from all pixels in image. height in an optional pixel point is set on a place where in terference signal is maximized, and by preforming this in pixel an entire image, this method produces three dimensional form.

  • Specifications

    • Interferometric objective : 5 lens available

    • Scan range : 0 ~ 180μm (option 270μm, 5 mm)

    • Vertical resolution : WSI < 0.5μm/PSI < 0.1μm

    • Lateral resolution : 0.2 ~ 4μm

    • Tip/tilt : ± 6 ° (probe tip/tilt)

    • Workpiece stage :

    - NV-P2020 / 200 x 200 mm (motorized)

    - NV-P4050 / 400 x 500 mm (motorized)

  • Applications

    • 3D analysis of surface

    • Semiconductor parts test

    • Roughness average measurement