Nano230 FE-SEM | 전계방출형주사전자현미경

연구실/분야 | |||
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모델명 | Nova NanoSEM | ||
제조사 | FEI | ||
담당자 | 이경애 | ||
연락처 | 052-217-4163 / kalee@unist.ac.kr | ||
예약 가능여부 | 가능 | ||
예약단위 | 0.5hr | 1일최대예약시간 | 2hr |
예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
장비위치 | 102동 B114호(Bldg.102, Room B114) |
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Description
SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.
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Specifications
• Electron gun
: Schottky type thermal FE gun
• Resolution
- < 1.0 nm @15 kV
- < 1.6 nm @1 kV
• Probe current : 0.6 pA ~ 100 nA
• Reduced charge & contamination operation
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Applications
• Secondary electron image
• Backscattered electron image
• Energy dispersive X-ray analysis EDS
• X-ray elemental mapping
• Nano-particles characterization
• Magnetic materials characterization