Quanta200 FE-SEM | 전계방출형주사전자현미경
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | Quanta 200FEG | ||
| 제조사 | FEI | ||
| 담당자 | 이경애 | ||
| 연락처 | 052-217-4163 / kalee@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 0.5hr | 1일최대예약시간 | 2hr |
| 예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
| 장비위치 | 102동 B110호(Bldg.102, Room B110) | ||
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Description
SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.
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Specifications
• Electron gun
: Schottky type thermal FE gun
• Resolution
- < 1.2 nm @30 kV high vacuum mode
- < 1.5 nm @30 kV low vacuum mode
- < 1.5 nm @30 kV ESEM mode
• Beam current : > 100 nA
• Heating stage (1,500 ˚C)
• Cooling stage (-20 ˚C)
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Applications
• High vacuum mode
• Low vacuum mode (10 to 130 Pa)
• ESEM mode (10 to 4,000 Pa)