보유장비

Quanta200 FE-SEM | 전계방출형주사전자현미경

Quanta200 FE-SEM
보유장비 관련 정보
연구실/분야
모델명 Quanta 200FEG
제조사 FEI
담당자 최인녕
연락처 052-217-4058 / choiin@unist.ac.kr
예약 가능여부 가능
예약단위 0.5hr 1일최대예약시간 2hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
  • Description

    SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.

  • Specifications

    • Electron gun

    : Schottky type thermal FE gun

    • Resolution

    - < 1.2 nm @30 kV high vacuum mode

    - < 1.5 nm @30 kV low vacuum mode

    - < 1.5 nm @30 kV ESEM mode

    • Beam current : > 100 nA

    • Heating stage (1,500 ˚C)

    • Cooling stage (-20 ˚C)

  • Applications

    • High vacuum mode

    • Low vacuum mode (10 to 130 Pa)

    • ESEM mode (10 to 4,000 Pa)