보유장비

Surface profiler | 박막 단차 측정기

Surface profiler
보유장비 관련 정보
연구실/분야
모델명 P6
제조사 KLA Tencor
담당자 김강오
연락처 052-217-4182 / ko8809@unist.ac.kr
예약 가능여부 가능
예약단위 30min 1일최대예약시간 1hr
예약Open(~일 전) 2주전 예약취소불가(~일 전) 2hr
장비위치 108동 B101호 (Bldg. 108, Room B101)
  • Description

    The P-6 stylus profiler and surface analysis system offers a combination of advanced features for process development and manufacturing control of scientific research, and other industrial metrology applications

  • Specifications

    • Single 2D & 3D scanning profiler

    • 150 mm diameter vacuum & motorized sample stage or bigger

    • Manual or auto theta sample stage

    • Zoom optic : top view 185 ~ 750 or 115 ~ 465 x

    • Automatic step detection and multiple cursor positioning

    • Scan length : 150 mm

    • CCTV zoom : top view 185 ~ 750 or 115 ~ 465 x

    • Stylus force : adjustable between 1 ~ 15 mg

    • L-stylus : 2 um radius 60 degree

  • Applications

    • MEMS / NANO device

    • LEDs

    • Storage device

    • UV embossing / Nano imprint lithography