보유장비

Thickness measurement | 박막 두께 측정기

Thickness measurement
보유장비 관련 정보
연구실/분야
모델명 ST4000-DLX
제조사 K-MAC
담당자 김강오
연락처 052-217-4182 / ko8809@unist.ac.kr
예약 가능여부 가능
예약단위 30min 1일최대예약시간 1hr
예약Open(~일 전) 2주전 예약취소불가(~일 전) 2hr
장비위치 108동 B101호 (Bldg. 108, Room B101)
  • Description

    Some portion of the light that is incident on the thin film surface is reflected
    from the upper surface of the sample, other portion is reflected from the
    interfaces between the thin film and the substrate.

  • Specifications

    • Detector : used wavelength range is 400 ~ 800 nm

    linear silicon CCD array (2048 pixel)

    • Stage size : 300 mm x 300 mm (12 inch wafer)

    • Lens : m 5 x, m10 x, m 50 x

    • Spot size : 40μm, 20μm, 4μm

    • Reflection probe : choose wavelength (300 ~ 800 nm)

    • Thickness measurement range : 100 Å ~ 50μm

    • Theoretical resolution : 1 nm

  • Applications

    • Semiconductor : Poly-Si, GaAs, GaN, ZnS, SiGe, ONO, SOI, SiLk

    • Dielectric material : SiO2, Si3N4, ITO, TiO2, ZrO2, BTS, HfO2

    • Polymer : PVA, PET, PP, PR