보유장비

Quanta 3D FIB | 이온집속빔

Quanta 3D FIB
보유장비 관련 정보
연구실/분야
모델명 Quanta 3D FEG
제조사 FEI
담당자 조미선
연락처 052-217-4034 / shail019@unist.ac.kr
예약 가능여부 가능
예약단위 0.5hr 1일최대예약시간 4hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
  • Description

    Dual-beam FIB has a multitude of capabilities including high resolution electron imaging, ion imaging, nano device fabrication, and material deposition. Simultaneous patterning and imaging are possible to nm resolution for both imaging and machining. FIB with both ion and electron beams enables highprecision cross-section processing and TEM/3DAP sample preparation

  • Specifications

    • Electron optics - Resolution

    HV : 1.2 nm @30 kV

    - Accelerating voltage : 1 kV ~ 30 kV

    - Probe current : up to 200 nA

    - Magnification : 30 x ~ 1,280 kx

    • Ion optics - Resolution : 7 nm @30 kV

    - Accelerating voltage : 2 ~ 30 kV

    - Probe current : 1 pA ~ 65 nA

    - Magnification : 40 x ~ 1,280 kx

  • Applications

    • Ultra high resolution electron, ion imaging

    • TEM sample preparation

    • Energy dispersive spectroscopy (EDS)

    • EBSD image