보유장비

Photolitho_MDA400S | 미세패턴 정렬 노광기

Photolitho_MDA400S
보유장비 관련 정보
연구실/분야
모델명 MDA-400S
제조사 MIDAS
담당자 배고명
연락처 052-217-4189 / bgm0421@unist.ac.kr
예약 가능여부 가능
예약단위 30min 1일최대예약시간 3hr
예약Open(~일 전) 2주전 예약취소불가(~일 전) 2hr
장비위치 108동 B101호 (Bldg.108, Room B101)
  • Description

    MDA-400S performs alignment and exposures by UV lamp on the wafer and substrates coated by Photo-resist through mask with alignment keys.

  • Specifications

    • High efficiency & high accurate UV exposure system

    • UV lamp : Hg 350 W

    • UV 400 : 350 ~ 450 nm (I-, H-, G-line)

    • Gap adjustment accuracy : 1μm

    • Methods : top side alignment only

    • Alignment accuracy : 1μm

    • Microscope magnification : 90 x ~ 500 x

    • Fully manual type system

  • Applications

    • Micro scale patterning for semiconductor process

    • MEMS / Nano device fabrication