보유장비

Nano Imprinter | 나노임프린트 묘화시스템

Nano Imprinter
보유장비 관련 정보
연구실/분야
모델명 ANT-6HR
제조사 KIMM
담당자 김민재
연락처 052-217-4064 / mjkim@unist.ac.kr
예약 가능여부 가능
예약단위 1hr 1일최대예약시간 3hr
예약Open(~일 전) 2주전 예약취소불가(~일 전) 2hr
  • Description

    Nano-Imprint fundamental principle is to transfer the master patterns defined in the stamp to deformable materials such as Photo-resist spun on substrate by mechanical press.

  • Specifications

    • Curing type : UV, thermal, UV & thermal

    • Imprint area : ~ 6 inch

    • Stamp : Quartz, Si, Ni, PDMS, PMMA, etc.

    • Imprint Pressure : ≤ 2 bar (UV), ≤ 60 bar (Thermal)

    • UV System : ~ 50 mw/cm2, 2 Kw

    • Temperature : RT ~ 250 °C

  • Applications

    • Nanostructure device imprint fabrication

    • Functional device chemical & bio sensor