보유장비

Cold FE-SEM | 저온주사전자현미경

Cold FE-SEM
보유장비 관련 정보
연구실/분야
모델명 S-4800
제조사 Hitachi High-Technologies
담당자 이경애
연락처 052-217-4163 / [email protected]
예약 가능여부 불가능
예약단위 0.5hr 1일최대예약시간 2hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
장비위치 102동 B110호(Bldg.102, Room B110)
  • Description

    자율사용전용(의뢰 불가)

    SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.

  • Specifications

    • Electron gun

    : cold cathode field emission electron source

    • Resolution

    - < 1.0 nm @15 kV

    • Magnification

    - LM 20 ~ 2,000 x, HM 100 ~ 800,000 x

    • Accelerate voltage : 0.1 ~ 30 kV (0.1 kV/step)

    • Electrical image shift : ± 12μm (WD = 8 mm)

  • Applications

    • Secondary electron image

    • Energy dispersive spectroscopy (EDS)