보유장비

Cryogenic Probe Station | 극저온탐침측정기

Cryogenic Probe Station
보유장비 관련 정보
연구실/분야
모델명 CRX-4K
제조사 Lakeshore
담당자 황은정
연락처 052-217-4192 / [email protected]
예약 가능여부 가능
예약단위 1hr 1일최대예약시간 24hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
장비위치 108동 B104호(Bldg.108, Room B104)
  • Description

    A probe station is used to physically acquire signals from the internal nodes of a semiconductor device. If the device is being electrically stimulated, the signal is acquired by the mechanical probe and is displayed on an oscilloscope. This is a ver satile micro-manipulated probe station used for non-destructive testing of devices on full and partial wafers up to 2" in diameter.

  • Specifications

    • Temperature : 6 K ~ 340 K

    • 4 micro-manipulated probe arms

    • 4" wafer probe capabilities

    • Cryogen-free CCR (closed cycle refrigerator)

    • High vacuum to 10-7 torr

    • Detector : KEITHLEY (4200-SCS)

  • Applications

    • Characterization of semiconductor device

    • Measurement of I-V curve in temperature variation (6 K ~ 370 K)

    • Measurement of 4 probe resistivity in temperature variation (6 K ~ 370 K)