Cold FE-SEM | 저온주사전자현미경

연구실/분야 | |||
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모델명 | S-4800 | ||
제조사 | Hitachi High-Technologies | ||
담당자 | 이경애 | ||
연락처 | 052-217-4163 / [email protected] | ||
예약 가능여부 | 불가능 | ||
예약단위 | 0.5hr | 1일최대예약시간 | 2hr |
예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
장비위치 | 102동 B110호(Bldg.102, Room B110) |
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Description
* Cold FE-SEM is out of order. The date of repair is on 30th, May.
• SEM Self-user training
- SU7000 FE-SEM: 1/3~4, 3/7~8, 5/2~3, 6/27~28, 8/22~23, 10/31~11/1
- Nano FE-SEM: 1/17~18, 3/21~22, 5/16~17, 7/11~12, 10/17~18, 12/12~13
- Quanta FE-SEM: 2/7~8, 4/4~5, 5/30~31, 7/25~26, 9/19~20, 11/28~29
- SU8220 Cold FE-SEM: 2/21~22, 4/18~19, 6/13~14
- Cold FE-SEM: 8/8~9, 9/5~6, 11/14~16
Please apply on the UCRF website at 9:00 am two weeks before the training day. [UCRF webpage]-[Participation space]-[Education & Seminar]
• Fee
- UNIST: 42,000 won/hr, Self-user: 30,000 won/hr
- Client: 60,000 won/hr, University: 54,000 won/hr, Enterprise out of Ulsan: 72,000 won/hr
• Description
SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun. -
Specifications
• Electron gun
: cold cathode field emission electron source
• Resolution
- < 1.0 nm @15 kV
• Magnification
- LM 20 ~ 2,000 x, HM 100 ~ 800,000 x
• Accelerate voltage : 0.1 ~ 30 kV (0.1 kV/step)
• Electrical image shift : ± 12μm (WD = 8 mm)
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Applications
• Secondary electron image
• Energy dispersive spectroscopy (EDS)